第三十五章:弯道超车,全球第一
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年。“
办公室里安静得能听见空调出风的嗡嗡声。***一屁股坐在沙发上,眼镜片后的眼睛全是红血丝:“我昨天还跟曾毓群说,年底前把未来01的月产能提到两万台,现在……JSR垄断了全球72%的KrF光刻胶市场,国产的最多做到ArF低端,KrF的良率连30%都不到,根本没法用。“
“倪院士呢?“
“倪院士在实验室,已经三天没回家了。“***声音哑了,“他联系了上海新阳、南大光电、晶瑞股份,几家联合攻关,但光刻胶不是砸钱就能出来的,树脂、光引发剂、溶剂,每一个环节都有专利壁垒,日本人卡了我们二十多年,哪那么容易突破?“
……
上海,张江高科技园区,上海新阳实验室。
凌晨两点,倪光南穿着一件洗得发白的中山装,蹲在光刻胶涂布机旁边,手里拿着个放大镜,盯着刚出炉的晶圆片。旁边几个年轻工程师趴在桌上睡着了,桌上堆着泡面桶和空咖啡罐。
“倪老,您回去休息吧,我们盯着就行。“项目负责人小王揉着眼睛走过来,声音里全是疲惫。
“睡不着。“倪光南把放大镜放下,手指在晶圆片上轻轻划过,“我1961年进中科院计算所,那时候我们连个像样的计算器都造不出来,现在都2017年了,我们还要被日本人卡光刻胶的脖子,我心里不甘啊。“
(本章未完,请点击下一页继续阅读)第三十五章:弯道超车,全球第一(第2/2页)
他站起身,走到白板前,上面画满了分子结构式:“现在的问题是树脂的纯度不够,光酸产率不稳定,导致光刻后的图案边缘粗糙,良率上不去。小杨,你昨天说试了甲基丙烯酸酯共聚物的改性,数据呢?“
“在这!“一个扎马尾的女工程师猛地坐起来,从一堆资料里翻出一沓图谱,“倪老,你看,把树脂的侧链改成环状结构,光酸的扩散长度从35nm降到了18nm,边缘粗糙度改善了40%,但灵敏度掉了15%,曝光时间得延长一倍,产能又跟不上了……“
倪光南盯着图谱看了十分钟,突然一拍大腿:“不是改性树脂,是改光引发剂!你们试试把PAG换成硫鎓盐类,和环状树脂匹配,灵敏度能提回来!“
实验室里瞬间炸了锅,所有人都扑到实验台前。小王一边配溶液一边嘟囔:“硫鎓盐的溶解性差,之前没人敢用,倪老您这步棋真险……“
“险才有效。“倪光南笑了,眼角的皱纹像菊花一样绽开,“当年我们做汉卡,也是没人敢走的路,最后不也走通了?“
……
七月中旬,深圳,叶氏总部。
叶流云正在看未来01的六月销量报告,数字定格在11237台。中国品牌首款月销破万的高端电动车,比预期的早了三个月。但还没等他高兴,***的电话打了进来,声音里带着哭腔:“云哥!成了!上海新阳的KrF光刻胶通过了中芯国际的验证!良率92%!和JSR的差距不到3%!倪院士刚才在实验室晕倒了,送医院了,医生说疲劳过度,得住院观察……“
叶流云抓起外套就往外走:“黑皮,备车,去上海!“
……
上海华东医院,VIP病房。
倪光南靠在病床上,鼻子里插着氧气管,看见叶流云进来,还想着要坐起来,被叶流云按住了:“倪院士,您别动。光刻胶的事我听说了,您这是拿命在拼啊。“
“值得。“倪光南声音沙哑,但眼睛亮得很,“小叶,我算了一笔账,上海新阳的产能现在每月能供500片晶圆,年底能扩到2000片,够你们车规级MCU的用量了。明年再扩产,手机芯片也能用。日本人想卡我们脖子,卡不住了。“
他伸手从床头柜上摸出一份文件:“这是联合攻关组的报告,我们不光突破了KrF,ArF的干法光刻胶也快了,预计明年中试,后年量产。到时候,从28nm到7nm的光刻胶,我们全都能自己做,再也不用看日本人脸色了。“
叶流云接过文件,指尖有点抖。他想起2004年第一次见倪光南,老先生拍着他的肩膀说“中国缺的不是钱,是核心技术“,十三年过去了,老先生头发全白了,但那股子倔劲儿一点没变。
“倪院士,未来01六月卖了11237台。“叶流云轻声说,“黑皮妈用赚的钱给村里修了条水泥路,说叫'未来路',感谢您,也感谢所有搞技术的人。“
倪光南笑了,眼角有泪光闪过:“好啊……好啊……我活了七十多岁,就想看到这一天,中国人造的东西,不用再低人一等……“
……
八月,临港工厂发布会。
叶流云站在台上,身后是刚刚下线的第10000台未来01。他没有提销量破万的喜讯,也没有提光刻胶突破的成就,只
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